# Sanchez Special NanoLab Dual Beam - Based on the FEI Company XT platform - Runs on Windows XP - Put together with parts from who knows how many systems - Its not really one model or another, but the software thinks its a NanoLab so we are going with that - Notice the special green frame, this was some kind of prototype system - When he got it it looked like this: - ![[1FA21E9F-9EAE-4600-9C1C-F40A3CEE0243_1_105_c.jpeg|grid]]![[30A54EFA-64E5-43FA-817D-7E10CE8EC06E_1_105_c.jpeg|grid]] - After a while it started to look like this: - ![[8A241C52-F194-467F-8371-8EC573467646_1_105_c.jpeg|grid]]![[B466A414-2A79-4EBB-8E62-FC523147FE00_1_105_c.jpeg|grid]] - Now it looks like this - ![[Pasted image 20240504193442.png|grid]]![[Pasted image 20240504193513.png|grid]] ## Observations and plans to address them With very helpful hints and advice from David Fisher at [[Superior Technical Services]] ## Ion Beam - [ ] Beam currents are all over the place - Could be L1/L2 settings - Could be multi hole aperture alignment - It seems that the aperture table is all over the place. Will need to go though and find all the actual aperture posistions ## Electron Beam - [ ] Pressure bursts on E-Gun when changing spot size - Could be breakdown in the module - This shows the same symptom as [[Coulomb Tube]] outgassing - Usually on a system that has been around for years stably running you can "trust" that the Coulomb Tube is clean - Given gun section was open for such a long time column tube is more suspect - Could be [[Coulomb Tube]]contamination - Given the column was open for years with no emitter section this is highly suspect. - Start at 10kV acceleration with C1 at 1300 - Slowly drop to acceleration to 1kv (unless using 500V, the drop to 500v. Do not use at 100v) - 100v increments - Keep vacuum better than 5x-9 - Could take hours to run - Raise C1 100V at a time to 4000, again keeping vacuum good - Vac will get bad as you get close to 4000, but condenser does not go above ~2500 during normal operation so this is ok - Beam will sweep entire tube during ramp up and down, going to 4000 beam showers the parts of the tube that only get irradiated during startup/shutdown during normal operation. - [ ] SEM beam currents are all over the place - Need to do condenser calibration with faraday cup ## Mechanic Chamber/Stage/E-Beam/I-Beam Alignment - Stage is not adjusted properly - Need to move the stage left or right - WD calibration or stage height is not proper - Need to get stage 5.0mm WD calibrated via various methods ==Setting this distance involves very carefully touching the sample holder to the poll piece!!! This can cause significant damage!!! You have been warned!!! - Can put a 5mm block on to of the sample holder then drive that into the poll pice - Or drive the holder directly into poll piece, then lower it 5mm. - Once you know sample is 5.0mm away from poll piece you do not adjust Z until after next step - Would then run final lens current calibration - Have to hold door close to pump - 4x bolts on right hand side adjust angle of door relative to chamber - This keeps you from having to push the door closed to get it to pump down - FIB column and SEM columns are not pointed at same spot - Set 5mm via methods - Calibrate final lens current - Adjust stage so Eucentric axis is under SEM column - One adjuster pushes, the other one pulls - Outside one is m3 bolt - Need to vent chamber to access the other adjuster - Math shortcut to adjust with minimal vent-pump cycles - David figure out the trig on this one, saves a ton of time doing this adjustment. Very clever. - Tilt 0-45 with sample in same spot - Then Tilt 22.5 - Measure how far feature moved from 0-22.5 - Multiply that number by 12.1, this is how far the stage needs to move - Moving by exact distance can be done by: - Adjusting push pull by quarter turn then calculate how far it moved - Use this to calibrate for the next move - Requires at least one vent/pump cycle - Using a dial indicator - Adjust stage to 5.0mm via right eccentric bearing adjustment - This will move stage left to right somewhat - ### Order of operations to address all of this - [ ] Level pneumatic platform - [x] Move scroll pump - [x] Door-chamber angle adjustment - [x] 5mm calibration - Loaded flat sample that was ok to touch poll piece with - Set stage tilt to 0 - Stage touched poll piece at Z: 2.1058mm - Drove stage to Z: 7.1058mm - Ran Final Lens Current Calibration - Set stage to 5mm away from poll piece (already done) 1. Focus image to set final lens current 2. Toggle stage between 5mm WD and 10mm WD and focus with respective alignment sliders to compensate final lens current - It has not update the Z WD link yet so 5mm is reading 7.1058mm and 10mm is readying 12.1058mm 3. Set the stage to 5mm WD and prefocus image using mouse (default right click drag on image) for the next step - during and after this step ==DO NOT USE FOCOUS KNOBS== 4. Precisely focus the image with mouse to set final lens remanence 5. Beam energy drops to 2kv. Use slider to set Final Lens Remanence for 2kV 6. Lens is degaussed, set 2kV remanence again 7. Resulting values - MdFinCf1: 0.785320 - MdFinCf3: -0.000006 - IFinRem: 1.469000 - WD is now reading 4.7mm when fully focused. Running calibration again. - I accidentally touched focus knob at the wrong time, this is likely what caused the offset. - New values - MdFinCf1: 0.785320 - MdFinCf3: -0.000003 - IFinRem: 1.958000 - Given the rest of the column and other optics have not been tuned yet this should be considered a coarse calibration - [x] Stage left to right via stage left side horizontal adjustment - First checking magnification calibration - Measured: 90.29um - Actual 100um - Ratio of 1.1075 - Set holy point to corner of part of sample - Adjusted so that holy point is on crosshairs at Tilt:0 and Tilt: 45 - Set tilt: 22.5 - Measured distance from holy point to cross hairs - D=84.55 um - ![[Pasted image 20240501203406.png|sm]] - Given offset ratio of 1.1075, D-actual = 93.6427 - To get actual distance axis is off multiply by 12.1 - D to move stage = 1133.0767 - In thousandths of an inch that is 0.0446 - So now the question is what direction do I move the stage? - Pretty sure I need to move to the right - Moved the stage right 44 thousandths on the dial indicator - ![[Pasted image 20240504192957.png|med]] - Had to back out the 4 set screws that set the door-chamber angle by 1/4 turn to allow the stage to move horizontally - The stage is moved with one of 2 adjusters. One move it left and the other moves it right - Right adjuster: Put an allen key in here to turn the head of the bolt. - ![[AAA52242-F673-43CD-9B5B-6C9CE19D7D49_1_105_c.jpeg|med]] - ![[Pasted image 20240504193238.png|med]] - Left Adjuster: Just put a long m3 hex in here - ![[Pasted image 20240504193331.png|med]] - Pumped down, stage now appears to be at (or at least much closer to) Eucentric - [-] Stage height via right side door eccentric bearing bolt height adjustment - After adjusting stage horizontal, the vertical seems to be dead on at 5mm WD - [x] New E-Beam Apertures - While chamber was vented to adjust stage swapped out apertures - Older holder is set up for silicon heated aperture strip. Apertures in heated strip are very worn out and contaminated - Do not have spare of silicon strip - Swapped for a holder that accepts standard 3mm pt apertures - Found 150um tall, 100um, 50um, and 50um tall apertures to install - Should be mostly 30um apertures, will have to change in future - Wobbled the aperture via the electron optics configurator - Selected the lens wobbler and manually enabled it - Using an alignment mode disabled external scan, but the main system monitor is facing away from the aperture i need to manipulate and as such I was wobbling using the open beam interface on my laptop. - Did the Stigmator alignment # 13 to eliminate the stig sweep - [x] Align the I-Column to the E-Column - Set stage to eccentric by tilting between tilt: 0 and tilt: 52 - Found a holy point with the e-beam, this is where I will move the I-Beam to point - Will not move stage after this - Paused scan and turned off e-beam. - Its possible to cause a gas burst while moving i-beam, so I do not want that to be able to affect the e-beam source - loosened all 8 I-Beam bolts by 1/2~1 turn - Began using flat head to move column around - ![[43CC2512-078F-4C7D-82C6-35DEFB88196A_1_105_c.jpeg|med]] - Finding it hard to move it far enough over to align beams - Moving the stage to find out how far is left to go... - Will have to use e-beam to navigate back to holy point, or will just type stage numbers back in - Starting stage X: 2.8913 Y: -12.5416 - Stage with I-beam on holy point: X: 2.4116 Y: -13.7132 - Difference: X: -0.4797 Y: -1.1716 - I am at the limit of how far I can move the I-Beam, and still not able to get the beams to over lap - Need to move the e-beam - Moving the e-beam caries the risk of damaging the through lens detector (TLD) lightpipe - Solution to reduce risk is to remove the SE electron detector assembly - Vented chamber - Noticed after removing the PMT (but not the light pipe and scintillator assembly) and looking thought the light pipe that the TLD lightpipe was very far off to one side - ![[Pasted image 20240503190257.png|med]] - Pulled the light pipe and scintillator assembly off but did not completely remove it as it has cables going to the poll piece that I can not disconnect without removing the ion column - With the risk of damaging the TLD now reduced, I loosened the bolts securing the column to the chamber - I moved the e-column towards the back of the chamber by approximately 2mm - ![[3379CB33-E509-4819-A6ED-65329062A8B1_1_105_c.jpeg|med]] - Reinstalled the light pipe and scintillator assembly - TLD is not much more centered - ![[Pasted image 20240503190638.png|med]] - Reinstalled the PMT - Pumped down system - Found new Eucentric after moving SEM column - Tilted stage to 52° and found a holy point with the e-beam, moved point under cross hairs - Turned off e-beam and made sure column isolation valve was closed before moving the ion column - Moved I-Beam around with big screw driver - After aligning holy point under the I-Beam cross hairs, began tightening down the 8 bolts to secure the column. - While doing this the image moved around a fair bit. Between a using a star pattern to tighten the bolts and moving it around a bit while tightening it I was able to get it fully secured and aligned. - Given the number of other alignments that still need to be done it both columns and with the stage this should be considered a coarse alignment. ## Other - [x] AVA and Motion did not connect to server after restarting software - Green lights on both controllers after the re-booted (they run windows NT internally!) - Loose ethernet cable on back of PC, plugged in and they showed up immediately. - [ ] Navigating via double click is not calibrated - [ ] Some stage tilt angles result in significant changes in image brightness - Could be a stage grounding problem? - [ ] Substantial vibration in SEM image, even more in FIB image - Cutting off water flow eliminates it - [?] Lost e-beam emission when turning the chamber camera on? - No apparent parameter changes - Restarting gun did not recover it - Restarting software did not recover it - Restarting PC did not recover it - Putting microscope into standby then taking it back out got emission back - Again no apparent parameter changes, but the source has emission now - Can not reproduce