## [[2024-11-19]] - Swapping in a new IGP - Built a extra dry air system to vent the IGPs with and to purge with while the pumps are swapped - Basically, just stuck a membrane air dryer with a pressure regulator on the output onto shop CDA and fed that into the vent port - Started up system, chamber vac at 2.4e-5 currently - ## [[2023-02-27]] "Check Vacuum" message appears on screen ![[IMG_8410.jpg|lg]] Checked interlocks - [ ] X-ray #Safety note - the Oxford cryo interlock is currently jumpered out, before we start up the Oxford system this needs to be connected PI/PE switch on power supply must be set to PI ## IGP Pressure changing with the thermostat - noticed a daily cycle in INT igp pressure. - Seemed to be room temperature related - Confirmed - By coming in after furnace had turned off and turned heat back on, igp pressure began to rise as pictured below. - Attempted to tighten bolts on flanges around lower 2 int IGPs. - Tightening bolts on the lower IGP resulted in the first 2 pressure spikes in this image, and hitting the side of the IGP resulted in the 3rd pressure spike. - ![[97D12C27-E41B-4F2B-A4A3-B45EB347507A.jpeg]] - I could see 2 things happening here - The increased temperature is resulting in more out gassing - the increased temperature is resulting in thermal expansion that allows a small leak to form. - [[2023-03-06]] - Applied heat to both IGPs as show in pictures - Applying heat for 30 seconds to the upper IGP resulted in a relatively small pressure change - Applying heat to the lower IGP for 30 seconds resulted in a much larger increase in pressure - ![[02F4F171-6E59-4B34-94C2-7D1784EFF677.jpeg|lg]] - ![[2AF2061E-316B-4ADB-A390-973AE91BF1ED.jpeg|lg]] - ![[5729EF58-8386-4D18-B0C8-D54CCDA18685.jpeg|lg]] - To verify this is not just out gassing I applied heat to the opposite side of the IGP on its housing. There was low to no describable pressure rise. ## De-configuring from bakeout [[2023-02-24]] - Restore water flow to control console - Close condenser lens water supply - Open objective lens water supply 1/2 turn - Remove foil (bakeout shield) - Unplug and remove bakout heater cables - Turn key on (if not already) - Clean out burnt grease from gun insulator ![[IMG_8366.jpg|grid]]![[IMG_8367.jpg|grid]] - Supplies I used - Shop towels (or Kimwipes, TexWipes, etc.) - A little ethanol - Foam swabs - to reach all the way to the bottom of the insulator - Also clean off the bushing side of the gun cap - Reinstall gun spacer - Reinstall shielding - Grease gun cap bushing with silicone dielectric grease - Install gun cap ## Bakeout - Started 10 hour bake 7pm [[2023-02-18]] - Only one of the lower IGPs is plugged in, one of the pumps experinces a pressure spike as shortly after power is applied to it. Think a bakeout might help it start. - 7:20 oppened lower manual valves to lower pressure in the int section. - 7:23 closed valves, pressure begn to climb immediately - 7:28 oppnened the int valves one at a time, pressure drop only observed when oppening the lower valve. - Gping to try starting both IGPs with the lower valve oppened. - This did not work, the pump supply did not get above 1kv. - 7:31 closed lower int valve again. - Pressure rise after closing valve is slower this time - Bakeout stopped when I restarted the IGP supply to try starting the lower int pump. - Will have to wait for pressure to drop befire it will let me restart the bake. - 7:36 restarted bake - 8:01 oppened lower int valve, pressure dropped - 8:02 closed valve - 9:15 [[2023-02–19]] bake finished some time ago, column fully cooled - Shut down IGPs to re-connect lower int IGP. Unlike all other attempts, IGP supply was able to successfully startup with both pumps attached. Pressure was only a half decade higher after. - 9:21 Starting bake with timer on longest possible bake time ## RGA Leak Testing - Going to swap the [[Leybold PTR90 Ion Gauge]] with our [[RGA]] - Cleaned a KF 50 to KF 25 adapter to mount gauge with. - Vented chamber with SPEC VENT button - Monitoring pressure with the RGA while applying the JB weld to the hole in the flange we found - ![[DS1Z_QuickPrint2.png]] ## Leak rate testing chamber [[2023-01-03]] - Now that the system has been pumping for a few days, we should get a more accurate leak rate result not influenced by outgassing - The chamber pressure reads 1.0x10-5. I would have expected it to be in at least the -6 if not -7 range by now. - Leak rate test is pretty simple, its just closing the valves and recording how much the pressure rises over some period of time. See [[JSM 6300 - JEOL W SEM#Vacuum|6400]] for leak rate specs - To leak rate test: - Record starting pressure from PI1 and PI3 test points - Put system into manual valving with: - RP: ON - DP: ON - V2: Open - All other valves: Closed - Start timer - Leak rate is measure in µA per hour, but you don't have to wait an hour. If you ran the test for 15 minutes, you would multiply the leak rate by 4. If you ran it for 20 minutes, you would multiple by 3 etc. The longer you wait the more accurate it is, but for very large leaks you can see it much sooner. - Starting Pressure: - PI1: 1.3 µA - PI3: 3.0 µA - Starting Time: 4:05 pm - Run Time: 15 minutes - Final Pressure - PI1: 63.2 µA - PI3 3.0 µA - Ok so we have a big leak. Going to get helium for the RGA. - Restored system to auto valving ## IGPs and preparing for Bakeout - Removing everything that does not get baked out - Electron Gun Cap - Remove HT Cable Management Clip. Return screw to threads, leave clip on cable. - ![[IMG_1356.jpg|lg]] - Removed 6 retention bolts from gun cap - Using a longer M6 screw, thread through the lifting bolt holes to separate the gun cap from the gun spacer - ![[IMG_1357.jpg|lg]] - ![[IMG_1358.jpg|lg]] - Outer Shielding - ![[IMG_1359.jpg|lg]] - Inner Shielding - Loosen both screws on the latches, then rotate latches - ![[IMG_1360.jpg|lg]] - The ones on the back can be hard to access with a regular screw driver, a low profile ratcheting screw driver comes in handy here - ![[IMG_1364.jpg|lg]] - Gun Spacer - This entire thing is going to be covered in silicon grease. Silicone grease is a notoriously hard thing to clean off of parts when prepping them for vacuum service. Using separate allen keys, gloves, and wrapping the part in foil is recommended. - Ensure that the 4 alignment bolts surrounding the gun spacer are snug. This is to prevent applying excessive force to the bellows that are hidden inside of this thing (Circled RED bellow) - ![[New Drawing 4.jpg|lg]] - Remove the 4 bolts that attache the gun spacer to the FEG emitter flange. (Circled RED bellow. The ones circle yellow are the bolts for the emitter flange conflat) - ![[New Drawing 3.jpg]] - Bottom side of the gun spacer - ![[IMG_1371.jpg|lg]] - Where the alignment bolts interface - ![[IMG_1374.jpg|lg]] - Noise Canceler Pre-Amp - Remove it and its metal bracket - You do not need to remove the alignment mechanism - Applied foil to column - Plugged bake out heaters in - Pinched off water cooling to the electronics (OPE off) - Closed objective water valve - Opened condenser water valve 1 turn - Pumping down the gun: - Theoretically, the gun is at a partial vacuum - BUT just opening the manual valves while pumping with the diffusion pump risks back streaming the pump - SO plan is to put the system into manual mode, close V1A and V1B, then open the manual valves, monitoring pressure with the leybold. - Chamber pressure reading 1.0x10-5 torr - Put vacuum system into manual, with RP and DP on, and V2 open backing DP. - Pressure up to 5.0x10-1 torr after oppening MV - closed V2, opened V6 V4 to rough - Started 15 minute timer - Valved over to DP pumping - Turned on SIP after 15 minutes - Data logging did not seem to pickup pressures from the SIP controller correctly - The INT pumps were not getting above 1kv - The Gun pump got almost to 7kv - The gun originally was reading down in the -4 torr range, but then went back to reading at high vacuum - I started to smell something coming from the sip controller - Not going to continue to attempt bake - Shut down SIP controller - Closed manual valves - Restored microscope to automatic valiving. ## Interlock Testing [[2022-12-31]] - Chamber pressure reads as 1.5 torr on leybold Interlocks to test before unattended operation - [x] DP water out - [x] Electronics water out - Passed - [x] Air pressure - Testing electronics water out first so I don't have to think about a hot diffusion pump as much. - Turned microscope on with vac mode set to manual (DP off), let electronics warm up for 10 minutes - Restarted microscope to reset DP warmup timer - Shut off water chiller, started timer - Console shut off after 2 minutes 25 secon²ds - Vacuum system remained powered - Testing air out - Interlock is currently set to just under 3kg/cm² - ![[IMG_1354.jpg|lg]] - Going to use regulator on air distribution to slowly drop pressure, will note when interlock trips - Air pressure interlock tripped at .23 Mpa on regulator. Will adjust up. - Pressure interlock after adjustment - ![[IMG_1355.jpg|lg]] - Re running pressure sweep test - Tripped right at .3 Mpa - Tightened adjustment lock nut on interlock - Testing V2 seating against back streaming - Restated microscope to reset DP heater timer - Set valves to manual - Opened V2 - about ~half a second before closing V2, I flipped the switch to open V5 (load lock). - There is a longer delay to open a valve, and ideally no delay to close a valve - Did not see any pressure rise on PG3, indicating that V2 seated correctly - To repeat test, I used LV2 to vent load lock, then re-ran test in same conditions. Again no pressure rise on PG3 indicating no leak past V2. - Testing DP water out - Restarted microscope in manual valving - Opened V2 and turned on DP. Set 20 minute timer. - After more than 20 minutes, shut off water chiller and started timer - Microscope completely shut off after 2 minutes 30 seconds - Restarted microscope with jumper on 1 minute timer because the DP is already warmed up ## Testing automatic evacuation [[2022-12-30]] - Testing vacuum system yesterday in manual mode went well. Replaced one of the DP warm up sensors. - The [[Edwards AGD Ion Gauge Controller]] did not turn on, so I am going to swap in a different gauge and gauge head - [x] Swap Gauge Head - Going to try to connect [[LabJack U6]] to various points in the microscope to do data collection. - Connect labjack to - [x] PI1 - [x] PI3 - [x] Intermediate IGP - [x] Gun IGP - [ ] Chamber Ion Gauge - New gauge controller, need to figure out pinout for it. - Getting PI1 and PI3 data logging setup - Normally we measure the pressure in µA, but the LabJack does not have built in current measuring - We could build a sense circuit, but measuring DC voltage between the 2 test points linearly correlates with current, so we are just going to do that instead. - At 253µA the voltage between the PG1 is 1.0810 volts - To test auto mode without the risk of back-streaming: - Unplug diffusion pump cable - Turn of OPE switch as this also shuts down objective lens water cooling - Be ready to short pins 1 & 2 on C7 and C8 on the vac board to simulate DP warm up - If you don't want to wait out the startup timer short the 1 minute override pins on the vac board - Testing the auto valving - Unplugged the DP heater cable - Turned off the OPE switch to shut down the optics - Unplugged C7 and C8 - Starting microscope up in auto vacuum - 1 minute timer not shorted (yet), planning to give it a chance to pump past the buffer tank critical pressure - System turned on DP and then opened V2 - Got PG3 pressure down to 120 - Shorted C7 and C8, heater LED went out - At 20 minutes microscope closed V2, and opened V6 and V4 - System closed V4 V6 at 200µA - System opened V2 - System opened V1A and V1B - So other than it valving over at 200µA, system performed well. Will need to adjust set point.![[IMG_1339.jpg|lg]] - - Adjusting the 180µA setpoint - Will go through similar procedure as did during auto valving, but instead will short 1 minute timer to 20 minute timer - Going to adjust VR11 (the 180µA adjustment potentiometer) to the left to try to set the setpoint well under 180 - Then, while the microscope is roughing chamber I will watch the pump down plot, as soon as it hits 180 I will adjust VR11 to the right until it valves over to DP - I will then verify that the set point has been set correctly by re-running the test. - Started microscope up with 1 minute timer shorted - Chamber pressure was 150 from previous test - Put valves into manual, opened LV3 for a few seconds - Put microscope back into auto, it opened V2 to back diffusion pumps - Did not start pumping chamber after 1 minute, but PG3 pressure was not bellow 120 - 120 is the supposed set-point for the microscope to pump the buffer tank bellow, normally the warmed up diffusion pump does this, but with only the rotary pump going it takes a bit. Last time the pressure reached as low as 95 after the 20 minute pumping. - I released and re-clipped the jumper on the 1 minute timer - Still has not valved over, going to restart and not go into manual at all - Restarted microscope with key - Microscope opened V2 and turned on DP - After a few minutes, micrscope closed V2 and opened V6 V4 - Started turning VR to right when pressure hit 181 - Microscope closed V6 V4, opened V2 then V1A and V1B - Restarted microscope, put into manual and vented chamber for 1 second - Restarted microscope, timer jumper still in place - Going to wait through startup and see where it valves over. - DP pressure is back up to 140 - Did not flip manual switch back to auto, restarting. - Restarted microscope - After 1 minute, with DP pressure at 147, microscope opened V6 and V4. Watching chamber pressure fall. - Microscope valved over at 204, will need to re-adjust - Went to manual, vented, back to auto - Restarted microscope, turned VR11 to the left slightly - DP pressure at 170. - Microscope skipped pumping DP, openend V4 and V6 to rough chamber after 1 minute - Microscope valved over at 175, going with that - ![[IMG_1341.jpg|lg]] - Starting up microscope under auto vacuum and with DP heaters on - Removed 1m jumper - Removed shorts on C7 and C8 - Plugged DP heaters back in - While waiting for microscope to warm up, will swap ion gauge heads - Vented using spec vent button. - Installed [[Leybold Center Three Ion Gauge Controller]] and [[Leybold PTR90 Ion Gauge]] - Released spec vent button before DP was done warming up - After 20 minutes microscope closed V2, opened V6 and V4 - DP Int pressure was just starting to fall through 80 at 20 minutes - At 230µA leybold read 1.5x-1 torr - Microscope valved over at 175, 6x-2 torr - After about 35 minutes, pressure was 5.0x-5 torr - After about 45 minutes, pressure was 3.0x-5 torr - ![[IMG_1349.jpg|lg]] ## Test measurement setup Measuring across PG1 and PG3 Using a 10 Ω shunt resistor 229 mV - ## Vacuum Startup [[2022-12-29]] - Filled rotary pump with oil - Cleaned rotary pump outside. Did not notice excessive oil leakage. - Connected rotary pump power cord to power supply, removed jumper on rotary pump stall relay. - Turned microscope on, power did not latch after key turn. - The vacuum board has been lock in manual with all switches off. I turned the RP switch on before trying to start the microscope a second time - Turned microscope on with the RP switch on, the microscope power right up. - *The computer came up without issue, was able to freely switch between fast and slow scan.* - Starting penning gauge pressures (at atmosphere in chamber, residual vacuum in buffer tank) - PI1: 256.2 µA - PI3: 257.0 µA - See [[JSM 6300 - JEOL W SEM|6300]] for info on vacuum board - Opened V2 to connect buffer tank to pump, pressure started falling on multimeter - Testing valves for actuation - Not going to test DP valves until pressure is equalized between DP and chamber - V4: actuates - V5: actuates - LV2: Actuates - LV3: Actuates - V6: Actuates - Pumping down chamber: - Opened V6 - Hear slight gurgling - Opened V4 - Sound from pump increased drastically - Saw pressure read as high as 264 - The pressure was not falling and pump stayed loud for to long - The valve on the cryo prep chamber was open, letting the chamber pull in air through the bottom of the turbo pump - Closed valve on cryo prep chamber and pressure started to fall - Hit 15 minute DP warm up timer - Closed V6 and V4 switch, Restarted microscope - Opened V6 and V4 - Pressure in both chamber and buffer tank was ~200µA, so I opened up V1A and V1B to test actuation - Valves audibly moved as soon as LEDs lit - I drew a line on the valve shaft, and open (O) and closed (C) indicators - ![[IMG_1309.jpg|lg]] - Used the new markers to visually verify both valves were moving - Pressure in the chamber with V1A and V1B opened reached 180µA, closed all valves. - Restarted microscope to reset 15 minute timer - Diffusion pump startup: - Opened up V2 - Connected multimeter to PI3 test pins - Started multimeter data-logging plot - Turned on DP heaters - Heard DP heater contactor close - Noticed that the DP heater warm up sensors are looking pretty ragged, will replace - Noticed pressure as low as sub 150µA before (as expected) pressure started to rise as the wet DP oil outgassed - Noticed pressure as high as 234.5 before it began to level off and then fall - Would not be surprised if there was a second peak as the pumps actually start to pump - Microscope shutoff, presumably 15 minute start up timer - I closed V2 before restarting microscope - Restarted microscope - Opened V2. Pressure had reached 180µA and quickly fell after V2 opened up - I would at this point expect the heater LED to go off soon. I am not surprised that it did not shutoff before the 15 minute timer as there was some delay between me starting the DP after the last startup - Additnally, the water chiller started at at 13.4C and a very high flow rate, so would not be surprised if that was slowing down the DP warm up. - Confirmed that both pumps are warming up - I noticed that the heater waring led is flickering, getting dimmer and brighter somewhat randomly. Seems to be trending to going out? - Both of these are switches, so I would hope they would just open or close. That appears to not be happening. - Unplugging C7 and C8 on the vacuum board (C7 and C8 are the warm up sensor switches) causes the LED to illuminate fully and steady - LED back on fully now, with C7 and C8 plugged in - Unplugging C8 and shorting the 2 left pins (1 and 2) causes the heater warning LED to go out completely. - Base pressure as low as 3.72 reached - Microscope shutoff on heater timer - Plot of pressure over time (dip after 16 due to shutoff after heater timer) - ![[IMG_1312.jpg|lg]] - Installed new (to this microscope is actually "proven") temp switch (will replace with actually new one) - ![[IMG_1313.jpg|lg]] - Restarted microscope. The vac controller appeared to hold off ~ 15 seconds before actuating v2 after restart. I had it closed for the first 5. - After a few minutes heater warning LED went out completely. - Added better labels to switches. - ![[IMG_1314.jpg|lg]] - Pumping down chamber - Plugged [[Edwards AGD Ion Gauge Controller]] - PG3 has dropped back to the ~6µA by now from a high of 130µA during restart after installing thermal switch - Moved multi meter test points to PG1 points - Closed V2 - Opened V6 - Opened V4 - Started multimeter recording - Waiting for pressure to drop past 180µA - Was setting up Edwards gauge controler. The one that came with the 6320 did not turn on. I got a almost identical spare out. Its speced for an APG-M gauge and I am using a AIM gauge, but it should be ok. - Pressure on PG1 reached 156µA. - Checked pressure on PG3, only a few µA - Valving over to DP on chamber now - Closed V6, V4 - Opened V2 - Opened V1A and V1B - Pressure dropped rapidly after V1A and V1B opened - Needle on Edwards gauge is still pegged bellow 10x-3 on ion gauge display, do not know if this is reading accurately. This disagrees with PG1 reading (I don't know exactly what PG1 at 6µA is in torr, but its definitely well bellow 10x-3) - Pressure bellow 6µA now - Pressure bellow 5µA now - Pressure reached 2.80µA after 30 minutes of diffusion pump pumping - ![[IMG_1315.jpg|lg]] - Just to note, this was all done with manual valving. Automatic mode has not been enable or tested yet. ## Inconsistent Startup [[2022-12-28]] - The systems sometimes makes it all the way through CPU startup and other times appears to hang. Thing to look for is do the gun alignment know LEDs light up or not. - Hitting reset causes different behaviors. Sometimes it gets to the the quad display with overlay characters, but still no light on the gun alignment knobs. - I took the interface PB off of the riser card, and it booted and turned on the gun alignment LEDS, but the rest of the system is unresponsive and the other controls like fast/slow on the scan control dont work. - Trying a reset resulted in the image going darker on screen but still no overlay - After starup I can turn the gun alignment knobs and the LEDs change, but if I press the slow scan button on the control pad the gun alignment knobs go unresponsive. - Reset again, this time display completely dark - Hitting the MODE switch change over the mode, but the rest of control are unresponsive, and there is a horizontal line displaying on the CRT. - Reset again - Can repeatedly toggle the course fine focus button - Hitting WFM brought up and image on CRT and LCD - I am able to navigate the menues - Hitting the scan speed buttons had no response - Hit the wfm button again and lost image on CRT and LCD. It went back to fast scan. - WFM button does not respond after this. - Course and fine focus also no longer responds.\ - Reset again - Hitting WFM brings up screen on CRT and LCD - Able to navigate menues. - Did not appear to be able to set the scan speed differently using keyboard menues, despite being able to navigate menu - Hitting wfm button again appears to lock up the system - Reset again - Hit EOS mode button - Hit WFM button - Brought up menues - Able to navigate menues - Able to sellect items like OL vs CL stig using arrow keys and ENTER on keyboard - Still unable to select different scan speeds - Was able to put EOS mode into SEM(HR) - Still unable to chjange scan speed - WFM is still sellected - Also unable to change scan mode sellection - Hitting the right photo button brings up a warming "Cancel WFM" - Sellected FREZ - Desellected WFM - Image on screen went away - Sellected SPEED SLOW button - CRT menue back on screen, able to change scan speed now - Image went away when I selected TV scan - Using the keyboard (even though I could not see it on screen) i selected speed 20 and got the image back on screen - Selecting fast button image goes away again - Slow button brings it back. - I am going to try and get the system to lock up now - I am unable to deselect FREZ via button on control pad - I was trying to see if I could deselect FREZ via software - The system shut down on me for unknown reasons. It was probably the diffusion pump not heated within 15 minute timer on the vac board. Other possibilities include clogged cooling water channels preventing flow through the electronics cooling channels. - Restarted system. Come up with green lights under gun alignment - Hit SLOW, no response - System appears to be locked up - Hit Reset - Hit WFM, able to access menues - Hit WFM again, system appears to lock - Hit Reset - Hit WFM, FREZ, able to access menues again - Released frez, released wfm, system appears to lock again. - I was staged to just hit enter on keyboard to select a slower scan speed, doing that did not put it into slow - Hit reset - Hit FREZ, system appears locked - Hit reset - Hit slow - Did not enter slow, system appears frozen. - Hit reset - Hit WFM, able to access menues - Magnification knob does nothing - Still able to navigate menues - Ok only able to enter menues, can not use arrow keys to navigate - Exited and entered menues, arrow keys work - Took a 20 minute break, system all the way off - Turn Key - WFM, FRZ, WFM (3x) again - Display came up and went away with WFM - Was able to select slow after screen went away, screen came back - Magnification does not work, but the focus knob does in fine and coarse. - Accelerating voltage know also works - Playing with the scan speed selector back and forth a few times got the system scanning - The system shut down due to vac board dp warm up timer - When I turned it back on it came up with an image on both screens, for the first time! - ![[IMG_1296.jpg|lg]] ## Connecting a PC monitor reference [[connecting a PC monitor to a JSM-6400]] Need to be in TV scan mode for this to work Plugs into one of the BNC connections on FIS-3 or FIS-1 - not sure we have the necessary cables at the moment FIS = [[Frame Image Store]] ### Helpful info from the list serve [[Where to attach a monitor to a JEOL 6300 FIS]] ## Unknown computer issue [[2022-12-28]] Placed HT tank and added connections to main ground - see [[JEOL grounding architecture]] CRT is still doing the brrrr thing - No change on CRT when reset switch is hit Probed interface 1 PB with [[Elenco LP-560]] - doesn't seem to be doing much Keys are not responding ==FIS-3 card wasn't seated== - reseated it Computer is now up and running! ## Character CRT glitch, computer not responding [[2022-12-27]] ![[IMG_1268.jpg|lg]] - Display was blank for some time, then the sound of the microscope changed and the CRT looked like this. ## Main power will not latch [[2022-12-23]] - Turn key to on then start - While key is in start the microscope turns on. Only error displayed on vacuum PB is that the diffusion pumps have not warmed up yet. - When the key is released from start to on the microscope turns off. - ![[6320F Startup Circuit Simplified.pdf]]