<< [[Zeiss Gemini Rebuild]] ![[Pasted image 20231031210735.jpg]] ## All the things you can align - [[Zeiss Gemini Optical Alignment#Source Mechanical Alignment|Source Mechanical]] - [[Zeiss Gemini Optical Alignment#Gun shift|Gun Shift]] - Aperture shift - Gun POTs - Aperture POTs - Condenser mechanical alignment - Stigmation - Stigmation Balance ### Source Mechanical Alignment - ### Gun shift - Influenced by - Source mechanical - Gun POTs - Aperture Shift ### Aperture shift - Influenced by - Source mechanical - Gun shift - Aperture Pots - Gun POTs ### POTs on the Alignment Coil Interface Board - Adjusting the pots using the wobblers when they are very far off is hard to do - First do a coarse adjustment (if needed) before moving on to using the wobblers to do a fine adjustment #### Coarse Adjustment - Go to Emission - Turn Condenser Off - - Before Adjustment - ![[Pasted image 20230905145855.png|sm]] - After adjustment - ![[Pasted image 20230905145935.png|sm]] - Good: ![[Zeiss POT Alignment.jpg]] bad: ![[Zeiss POT Alignment Bad.jpg]] ![[Zeiss POT Alignment Bad Straight.jpg]] ### Pre-alignment - 10 kV - 5 mm WD - Zoomed all the way out (43x) - Scan Speed 6 - Stigmation -> Stig balance calibration - Stig balance x and y -> 50% - Aperture Calibration -> Cal Gun/Aperture Align - Zero gun alignment - Zero aperture alignment - Condenser off - Emission - Detector -> In Lens ### Gun Mechanical Alignment - Get the bright ring centered around the bright spot ## Calibration Wizard ### Scanning Calibration > Adjust Mag Comp. Amplitude to eliminate any leading edge distortion. Do not change from the default values unless necessary and do not exceed 50%. Now find and centre a point of interest. Adjust Mag Comp. Offset at the fastest scanrate so that the centre of rotation coincides with the crosshairs. (Use Auto Scan Rotate for this). Now adjust the offset for each slower scanrate down to scan rate 6 so that the image stays centred. The values set for scan rate 6 will be used for all slower rates.Also calibrate at 512x384 resolution at the fastest scanrate. Repeat the entire procedure for each Mag Range if applicable. ![[scanning calibration.jpg]] When you check Auto Scan Rotate the image will start spinning. ### Magnification Calibration #### the standard http://aisthesis-products.com/critical-dimension-standard ![[02.jpg]] ![[03.jpg]] ![[04.jpg]] ![[06.jpg]] #### Mag cal procedure ##### 200x ![[mag cal 200x.jpg]] ##### 2000x Using the 10 micron pitch lines ![[mag cal 2000x.jpg]] ##### 20kx Using the 1 micron pitch lines ![[mag cal 20kx.jpg]] ##### 35 kx Using the 1 micron pitch lines ![[mag cal 35kx.jpg]]