## Notes - [[Zeiss Interlock]] - [[Zeiss Gemini Optical Alignment]] ### [[2023-10-31]] - Source ramp up and conditioning - Starting values: - Gun vacuum: 5.25e-10 (Beam On 3kv) - Chamber vacuum: 8.25e-7 - Extractor current (beam on): 117.4 - Extractor current (beam off): 154.6 - HV conditioning - ramping up 1kv every 3 minutes. Stoped at 13 kV. - Only needed 10kv for alignment - Alignment - ![[Pasted image 20231031210735.png|med]] - Left system aligned - Some vibrations from stage visible. - Vold ~~colieded~~ touched the sample to the poll piece in a highly controlled manner, the vibrations went away immediately.e ### [[2023-10-27]] - Installed microscope on 2023-10-23 - Put system into bake out - Before we arrived today Vold found that: - There seems to be a leak in the lower IGP area - Voltage plot of lower IGP, pressure improves after bake-out is stopped, but then after some time is starts rising on its own - ![[Pasted image 20231027171439.png]] - the pressure in the lower IGP improved when the microscope was vented - ![[Pasted image 20231028011610.png]] - Vold tightened the bolts on the intermediate IGP conflat and found that pressure spiked while tightening the bolts and got better when losing the bolts on the other side of the flange. - This is an indication that the conflat gasket needs to be replaced. - Top manual valve was stiff, had to wrap microfiber around valve to get it to open. - Found flakes of something when we separated the intermediate ion pump - ![[Pasted image 20231027181638.png|med]] - ![[Pasted image 20231027181653.png|med]] - ![[Pasted image 20231027181818.png|med]] - ![[Pasted image 20231027181828.png]] - Leak checked the microscope in these configurations, did not find anything. - ![[Pasted image 20231027204215.png]] - ![[Pasted image 20231027204249.png]] - Vold will wrap in foil and get microscope into bake. - ### [[2023-10-17]] Adjusting stig balance for each aperture at 10 kV Conditions - 10 kV - Signal - SE - condenser normal ==this didn't appear to make a difference vs condenser off== - 5-10kX - Scan speed 1, reduced scan - Stig bal amplitude 100% - Stig bal period 200 Adjusted gun align for each aperture at 10 kV Conditions - 10 kV - Condenser off - Emission - Signal - In Lens - Scan speed 6 Center bright spot inside "halo" with Gun Align for aperture 1 For apertures 2-7, use Gun At Adjusted aperture align for each aperture at 10 kV Conditions - 10 kV - Condenser off - Normal (not emission) - 5-10kX - Signal - In Lens - Scan speed 1, reduced scan - Wobble amplitude 75% Adjust aperture align to minimize motion during focus wobble Use Aperture Align for aperture 1, then Aperture At for apertures 2-7 - Went back through all apertures and adjusted stig wobble again ### [[2023-09-21]] - Turned off heaters at 12:29 P< - We have to keep monitoring the system, if the pressure drops to low the ion pumps will shutoff because the Zeiss vac controller and ion pump controllers do not know the difference between the pump being off and the pump operating at a very low pressure. - ![[Pasted image 20230921123114.png|lg]] - 2:00PM curenet pressure/voltages - ![[Pasted image 20230921140136.png|sm]] - Upper IGP 2.41e-9 - Lower IGP -0.095 - Starting gun parameters - ![[Pasted image 20230921152904.png|med]] - Reinstalled HT interlock switch flange - Reinstalled HT cable - Reinstalled HT ground - Turned HT service switch to on - HT is still not enabled? - ![[Pasted image 20230921154436.png|sm]] - There is a Column Chamber Valve Error? - Yes this is indeed a column isolation valve problem - ![[Pasted image 20230921154615.png|sm]] - This is the cable for the isolation valve - Plugged it back in, did not clear the error on its own - Triple clicked "Column Chamber Valve = Error", brought up this menu - ![[Pasted image 20230921155013.png|sm]] - Selected Close Column Chmaber Valve - State now says Column Chamber valve closed - EHT still not enabled - Sellected Open Column Chamber Valve - EHT still not enabled - Restarted the software - EHT now enabled - Gun bring up - Turned on the beam but NOT EHT - It ramped the filament up to 2.290 A and then the extractor to 3.80 kV - Emisson current (green) is lower than it was before but it is climbing up on its own. - Started around 80 uA, now 10 minutes later its at 85 uA - 7:51 pm emission current has continued to rise, will leave overnight - ![[Pasted image 20230921195225.png]] ### [[2023-09-19]] - The ion pumps started at 8:14 pm last night - The almost immediately got to a pressure of 2e-7 torr - By midnight they were 3e-9 torr - They have plateaued at 1.9e-9 torr - System vacuum is at 2.67e-6 torr - So having the manual valves closed for IGP startup was not optimal (I think? We need to get some instrumentation to explore the dynamics of IGP startup and contamination migration. This would be how JEOL would have recommended to stat it up), but it was not starting up from atmosphere, it was just gases that it would have - Turned bake out heaters on 5:27 PM - Planning on leaving manual valves closed but will evaluate based on what pressure doesTurned bake out heaters on 5:27 PM - Planning on leaving manual valves closed but will evaluate based on what pressure does - Set the ==HV service switch to OFF== - ==Removed gun ground cable== - Wrapped column in foil - Put panels on - Lower IGP is reading -3.63 volts and falling (pressure rising) - Bakeout as of 5:51 PM - ![[Pasted image 20230919175234.png|med]] - #### To restore from bakeout - [x] Re-connect gun ground cable - [x] Turn HV service switch to ON ### [[2023-09-18]] - We lost power due to "Animal Contact" (the utiltites words) - Restarting the scope and putting it into bakeout - Reconnected the KF 40 flexible tube - Had to pull the KF T off the turbo pump, the VP hose is blanked off - ![[Pasted image 20230918175009.png|sm]] - ![[Pasted image 20230918175025.png|sm]] - ![[Pasted image 20230918175036.png|sm]] - Pre-bake heater resistances - Column: 363 - Band 1: .83k - Band 2: .84k - Band 3: .83k - IGP 1: 335 - IGP 2: 333 - Heaters on at 5:55 pm, [[2023-09-18]] - Openend manual valves 6:20 pm - Hit reset on vac board - After hitting reset scroll pump turned off - BUT vent valves did not open - Waiting for IGPs to start up - System pressure 3.79e-5 torr - Vac status says "Pumping" - System is not starting IGPs, chamber pressure likely to high - Closed manual valves - Turned heaters off - Will try again after system as pumped down more. ### [[2023-09-07]] Went through stig balance/focus wobble aperture correction on all 7 apertures at 10 kV Went through apertures again at 1 kV with condenser off - settings are very close. With condenser on, corrections still need to be made. Scanning Calibration Procedure - Mag Comp Amplitude was set at ~72%, instructions say not to exceed 50% so I set it down to 50%. Not sure I can see any distortion at any of the settings. - Set Mag Comp Offset at scan speed 1 such that center of scan rotation was in the center of the image, then adjusted for scan speeds 1-6. Only very minor adjustments were necessary. Also checked at 512x384 at scan rate 1 - no adjustment necessary. - Could definitely zoom in farther and do this again more precisely. Scan orthagonality procedure Magnification calibration procedure ### [[2023-09-06]] Investigating high current mode Step 1: get aperture 6 or 7 aligned Just clicking "reset gun align" and "reset aperture align" got an image Iterating between centering the bright spot in the halo w/gun align in Emission, and eliminating focus wobble with aperture align, converges w/ emission bright spot in the spot we previously marked as center of mechanical alignment Checking "condenser reversed" doesn't change much Did stig balance at 1kV with condenser on and 10 kV with condenser off (Aperture 1) Coarse aligned gun/aperture for apertures 1-7 Stig balanced for apertures 1-7 (should have done this in the opposite order) ![[CleanShot 2023-09-06 at [email protected]]] ### [[2023-09-05]] - Found some... Inconsistencies in the manuals that are applicable to this microscope - Gemini = the column this SEM uses - Many Zeiss SEMs us Gemini columns. There are also Zeiss SEMs called Gemini - Sigma = the model of this SEM - The functionality of the "Wobble" is described differently in the Sigma and Gemini manuals! - ![[CleanShot%202023-09-05%20at%[email protected]|lg]] - So we are testing it - ![[Pasted image 20230905134853.png|lg]] - Probes on the objective lens connector - The objective did not change when it was in wobble - Furthermore, [[Jeff Streger]] confirmed that Zeiss FEG SEM wobbles the gun - More alignment deflector coil testing - This time testing across the POTs to see how the voltage changes on both sides of them - On POT 1, which as we found last time is GUN X - Have the probes on the lower and upper pin - Did NOT see any change in votage when changing Aperture - Exploring POTs more - Earlier found that I was able to change the appearance of the emission image via the POTs - Before Adjustment - ![[Pasted image 20230905145855.png|sm]] - After adjustment - ![[Pasted image 20230905145935.png|sm]] - Also, just found that I was able to use the POTs to mostly eliminate image shift when moving GUN Wobble - After eliminating image shift when in Gun and Aperture Wobble - ![[Pasted image 20230905152335.png|sm]] - Pictures of alignment coils - ![[F82F09F4-13EA-4F68-95E9-32DC7E3778F3.jpeg]] - ### [[2023-09-01]] Pre-alignment: - 10 kV - 5 mm WD - Zoomed all the way out (43x) - Scan Speed 6 - Stigmation -> Stig balance calibration - Stig balance x and y -> 50% - Aperture Calibration -> Cal Gun/Aperture Align - Zero gun alignment - Zero aperture alignment - Condenser off - Emission - Detector -> In Lens Gun Mechanical Alignment: - Get the bright ring centered around the bright spot ==Hysteresis correction==: Shift + F2 ### [[2023-08-31]] ![[Pasted image 20230831163943.png|grid]]![[Pasted image 20230831164000.png|grid]] Physical button-up checklist: - [x] Install new feet and vibration pads - [x] IGP HV and heater cable routing - [x] Ion gauge back on without the tee - [x] Tee back on to the turbo pump - [x] Clean up internal cabling - [x] Secure internal cabling - [x] Check internal grounds - [x] Check that D-sub connectors are screwed together - [x] Level the plinth - [ ] Panels - [ ] Remove dents - [ ] Clean - [ ] Install w/grounding hardware - [ ] Replace fan in power supply (making intermittent loud rrrrr noise) ![[Pasted image 20230831164025.png|grid]] Put a loop in the ground for the column cover so that the insulated section of the cable could not be pulled past the heaters. ![[Pasted image 20230831164241.png|grid]]![[Pasted image 20230831164534.png|grid]] More pictures of cable routing: ![[Pasted image 20230831164551.png|grid]]![[Pasted image 20230831164826.png|grid]]![[Pasted image 20230831164901.png|grid]]![[Pasted image 20230831164843.png|grid]] ### [[2023-08-25]] - Tried to get EO test program from windows XP based sigmas running on windows 10 - Had to change can32.dll to the old one that was also used on XP - Use EO Test Program to manually adjust optics - Figuring out what the POTs do - Found that value on the lower pin on POT 1 changed when changing GUN X slider in EO Test Program - Lower pin on POT 4 changed when changing Aperture X - Lower pin on POT 3 changed when changing Aperture Y - Lower pin on POT 2 changed when changing Gun Y - Figuring out what the jumpers do - Jumper 1 changed with Stig Y - Jumper 4 changed with Stig X - Procedure: - Zero everything (gun, aperture, stig) - Set stig balances to 50% ### [[2023-07-25]] - What do these do: - ![[Pasted image 20230725133957.png|sm]] - Going to put a DMM on them, change various deflectors, and see what causes the voltage on the back of them to change. - Measuring on lower pin of 1: 1.26V - Gun wobble On-X- last digit is changing - Gun wobble On-Y - nothing - Aperture wobble OnX - nothing - Aperture wobble onY - nothing - Stigmator X knob - nothing - Stigmator Y knob - nothing - calling [[Jeff Streger]] ### [[2023-07-21]] - More performance checking and aligning. At this point we strongly suspect the source is a little bit off. - Starting with aperture align at 10kv at 5mm WD, then will change to 1kv and see how closer aperture align still is - After changing from 10kV to 1kV the optimal aperture align changed a bit... - Had some strangeness come up - Did a test to see if the water chiller had an impact on stability - Turned off the water chiller. The water flow alarm did not immediatly go off - The image did not seem to improve, but it did start to drift - After ~20 seconds the alarm went off, and a water flow and EO 24V error came up - This did not turn off the gun - We re-established water flow but still did not get an image - We shut down all user software - We shut down server - Server took an un-expectadly long time to close - Hung at 74% - Hindsight here: This may be when the microscope is ramping down the gun - Put the scope into standby - Took scope out of standby - Restarted server - Restarted software - Electron source was complexly ramped down (we expected the filament heat and emission to still be on) - Ran through this a second time and noted that it was held on EHTDLL, which seems to confirm that it is shutting the gun off - Exploring the microscopes various databases, found an entry under KEYS --> EHT --> LeaveBeamOn - We found it set to 0 - In the database from the PSU gemini it was set to 1 - We shut down user software, launched SmartSEM Administrator and set it to 1 - This should in theory keep the gun on? - Adjusted the focus of the chamber camera to focus directly on the poll piece - See [[Evactron]] for some notes on what we encountered with the plasma cleaner not igniting ### [[2023-07-20]] - More figuring out alignment - Normally when you are doing an alignment after a source swap, you are just doing the alignments you need to based on the source being different - HOWEVER this time we are doing a full factory alignment, as this microscope came without its database - This means we need to figure out what other alignments we might need to do before we really lock down the gun mechanical alignments - Out of all the alignments, gun mechanical hits the most different. It has an impact on everything that follows... - But what alignments could have an impact on gun mechanical shift? - Did Stage Angle alignment, which was 0 when we started and we left it at 113° - Previous Called Gun Align - X -4.4% Y 3.4% - Previous Called Aperture Align - X 6.1 Y -5.3 - Resulting emission pattern after 0ing aligns (condenser on) - ![[Pasted image 20230720182305.png|lg]] - With condenser off - ![[Pasted image 20230720183119.png|lg]] - It looks like after stage angle, even emission was changed - Did beamshift calibration - Did output device calibration #### What alignments are there? - Scanning Calibration - This adjusts the center of the image across multiple scan speeds, and corrects for various other scanning artifacts that change with scan speed - Magnification Calibration - Calibrates the magnification for each - Calibrate Quadrizitaet - Adjusts line to frame ratio so that X and Y dimensions are equal - Scan Orthogonality - Make a right angle square - Mag Range Offset - Centers the image between mag ranges - Adjusts the mag range gain relative to a beam shift - Stage Angle - This one changes a lot of other ones, and is currently at least 90° off - Beamshift - You move postion a point of interest in the middle of the screen, then use beamshift to move said point to crosshairs that the software displays on screen for you. This teaches the microscope what the resulting image shift from a given beam shift are - Dual Mag - Aligns and adjust the dual mag functionality - Unless they are doing something really clever this should not have an impact on anything but dual mag - Stigmation Calibration - This just seems to preset stig values - Spot Position Calibration - This corrects the spot scan so that wen you drop a spot scan it is in the same place that it is in the image - Assumes that Scanning Calibration has been done - This is basically correcting for the inductance and hysteresis of the scan coils. - ABCC Calibration - Adjust the Auto Brightness Contrast settings - Output Dev Cal - This calibrates the relative size of the scan to the relative size of the specific monitor that you are using. - This is probably how magnification gets determined if you have "Reference Mag" set to output device in user settings - We usually set Reference Magnification to Ploroid 545 so that it matches other scopes. - Field Mode Calibration - Does adjustments and offsets for when you go into field mode. It does not appear to have an impact outside of field mode? - Fisheye - Fisheye Mode Offset (rotation) - Orthag Correction - Quadrature - Imageshift - This alines the image to the same point for every aperture and current mode - Stage Center Calibration - This calibrates the stage center by rotating the the stage and finding the centroid - Stage Tilt Center - Similar to stage center but with tilt - Stage Tilt - You 0 the stage tilt - Can do this with the door open or via other means like beam focus or TV camera - Stage Height - calibrates the working distance relative to the stage height - Holder Rotation Calibration - This adjust the rotation of the holder graphic relative to the holder, so that the holder is in the right orientation for sample exchange ### [[2023-07-14]] - Played around with alignment a lot yesterday - ![[Pasted image 20230714133302.png]] - This is the plot from this morning/yesterday - The instability in emission current arose as a result of moving the source around during alignment. There was one direction that resulted in a drop in emission current but a rise in pressure in the gun IGP, and another direction that resulted in a rise in emission current but a drop in gun pressure. Neither of those areas was where the gun should be or was aligned. - Dealing with some alignment issues... - Went to 20kV, zeroed everthing (stig, gun, apertrure, etc) - Turned off condenser - Tried to use mechanical gun aligmnet to center emmission pattern, was unable to center emmission patern - Using some gun align and aperture align, was able to center emmsion pattern - Did focus wobble on image and use aperture align to cancel wobble - This always results in the spot a bit off to the right? - The spot is centered in scan speed 10, but not scan speed 6 - Establishing what the blue potentiometers on the side of the column do - TBD - The beam is not centered when it should be - At 20kv with all alignment 0rd - ![[Pasted image 20230714161522.png|lg]] - At 20kv with the gun and aperture alignment done - ![[Pasted image 20230714165500.png|lg]] - - Detector configuration - The only inputs we have gotten working so far are in lens and tv input - Comparing detector configurations between what customer provide from old computer and current and they do not match - The detector we especially want to work is the SE/ET, labeled SE2 - From client: - ![[Pasted image 20230714164104.png]] - Current - ![[Pasted image 20230714164119.png]] - ### [[2023-07-13]] - ![[Pasted image 20230713144920.png]] - IGP pressure continues to drop, and extractor current continues to rise, although its rise is slowing down with a dog leg in it about 6 hours ago - Gun vacuum: 1.19e-10 torr - Extractor Voltage: 3.8 kV - Extractor Current: 114.4 µA - It seems likely the [[Schottky]] [[FEG]] source is transition to an equilibrium geometry, as the initial bringup we carried out was a bit slow in getting extractor voltage applied #### Alignment - 4x 6mm alen keys make this step easier - ![[Pasted image 20230713151556.png]] - Windows needed: - Aperture Calibration - Calibrate Stigmation - SEM Controls - The goal is to start the column with all the deflectors in the column 0rd, so we can do just mechanical first - Starting in the Aperture Calibration window - Click "Cal Gun/Aper Align" to enable all the tools in this window - Select Gun Align and 0 it - Select Aperture Align and 0 it - In the Calibrate Stigmation window - For each aperture - 50% balances and 0 Stigmators - You must me in normal scanning (as opposed to emission) - Initial mechanical alignment - SCAN SPEED set to 6 when you are doing alignment - The gun coils that get scanned in emsion have much higher inductance than the normal scan coils, so they need to be scanned slowly otherwise all of the alignment will be off in one direction do the the offset in time/beam position that inductance create. - You can set the default emission scan speed in Tools>User Preferences>SEM Conditions>Emission Mode - In the Aperture calibration window - Uncheck condenser normal - This turns off the condenser - Click "emission" to change emission. Will display "normal" - Use gun align and aperture align to try to find the the beam - Set the beam to 20kv - The alignment is much more sensitive to the mechanical alignment with the beam at 20kv - As I am increasing beam voltage vacuum pressure is going up some - Started at 1.19e-9, stabilized at 1.74e-9 - Emission current is remaining constant - Was having a very hard time using the mechanical alignment screws - The movement of the emiison pattern did not seem linearly coralated with how we were moving the screws, it was kinda jumping all over - Removed the alignment screw and found that the screws that Zeiss used had a rotating ball on the end. There is a flat on one part of the ball. - On the gun side, where the set screws engages with the moveable part of the gun flange, the surface there was indented and look to be unevenly worn by the alignment screws - We applied anti-size to the tips of the alignment screws. - This significantly improved our experience ### [[2023-07-11]] Status: Filament 2.3A, Extractor 3.8kV, EHT 1kV, Liner tubeL 8kV, Suppressor: 300V, Extractor current: 106.4µA, Gun vacuum: 2.18e-9 Torr, Int IGP: -0.029V ![[Pasted image 20230711133141.png]] DC Conditioning: - Filament current: 0, Extractor voltage: 0 - Manually increasing kV - Gun vacuum immediately drops - 1 kV: Gun vacuum: 5e-10 Torr - 5 kV - 7 kV - 8 kV - 9 kV - 10 kV: Gun vacuum: 3.86e-10 Torr - 12 kV - 13 kV: Gun vacuum: 3.69e-10 Torr - 16 kV - 17 kV - 18 kV - 20 kV: Gun vacuum 3.3e-10 Torr. Set liner tube to 0 kV. - 22 kV - 23 kV - 24 kV - 25 kV, Gun vacuum: 3.14e-10 Torr - 26 kV - 27 kV - 28 kV - Loud discharge, pressure spiked to 1.2e-7, monitor is reading 15 kV - Dropped down to 15 kV - Set point started decreasing from 28 - Monitor reported that voltage went back up to match the set point (27, 26, 25...) - 20 kV - 21 kV - 22 kV, Gun vacuum: 4.29e-10 - 23 kV - 25 kV - 25.2 kV - 26 kV Wait 15 minutes - Pressure dropped from 2.88e-10 to 1.55e-10 a few minutes after setting 26kv, and was 1.32e-10 after 15 minutes - 27 kV Gun vacuum: 1.25e-10 Torr wait 15 - 27.5 kV Gun Vacuum 1.12e-10 wait 15 - 28 kV Gun Vacuum: 1.01e-10 wait 15 - 28.5 kV Gun Vacuum: 9.39e-11 wait 15 - 29 kV Gun Vacuum: 8.86e-11 wait 15 - 29.5 kV Gun Vacuum: 8.37e-11, Int vacuum: -0.030VDC wait 15 - 30 kV Gun Vacuum: 7.88e-11, wait 15 - 30.5 kV Gun Vacuum: 7.53e-11, wait 15 - 31 kV Gun Vacuum 7.13e-11, wait 14 - Ramp down HV to 0 - Attempted to start gun using dialog in user software, it looked like it was ramping up but I did not see any emmison current. - Also noticed that the monitors were not updating for any of the HT paramaters - Restarted user software and server and still see the same behavior - Fully restarted scope and problem is resolved - Apparent bug in the Zeiss software: - ![[Pasted image 20230721144325.png|lg]] - With the Zeiss software: - Turn gun on by selecting "Gun On" - See the gun ramping up in gun mon - Select gun off from drop down menu - A dialog box pops up in the lower right corner asking if I am sure I want to turn gun off - While dialog box is on screen, gun stops ramping - If you click yes, the dialog box disappears and the gun JUMPS to whatever value it was at in the ramp up, then it starts ramping down from the new higher value. - Configured for 1kv beam shower, leaving in this conditon overnight - ### [[2023-07-10]] Gun vac: 3.69e-11 torr - Starting up the source - Heating filament to 2.3A, 1800k - Blue = filament heating current, purple/pink = IGP pressure, red = chamber pressure - ![[Pasted image 20230710154003.png]] - Going to start bringing the extractor voltage up - Data sheet spec: 3.8 kV - Accelerating voltage at 0 - Extractor current: 0.1 µA - Goal: Over 25 µA - Procedure: - Ramp extractor to 2000V - Hold 5 min, see if extraction begins - Seeing 1.8 µA emission current at 500V - Gun pressure spiked to 1.3e-10 Torr - Not increasing at more than 500V/min, and pausing for 10 min at 1000 V - 📍Extractor 1000V, Emission: 6.5µA, Gun pressure: 1.25e-10 - Wait 5 min - 📍Extractor 1500V, Emission: 12.4µA, Gun pressure: 1.28e-10 - Wait 5 min - 📍Extractor 2000V, Emission: 20.4µA, Gun pressure: 3e-10 (spiked) - Wait 10 min - 📍Extractor 2500V, Emission: 31.7µA, Gun pressure: 3.57e-10 (spiked) - Wait 5 min - 📍Extractor 3000V, Emission: 46.6 µA, Gun pressure: 5.42e-10 - Wait 5 min - 📍Extractor 3500V, Emission: 69.2µA, Gun pressure: 1.05e-9 - Wait 5 min - 📍Extractor 3800V, Emission: 90.1µA, Gun pressure: 1.63e-9 - Waited 3 hours - Extractor 3800V, Emission 110.2µA, Gun pressure: 1.26e-9 - Bringing up Eht now - One click up, .02kV, and extractor current dropped to 81.8µA and gun pressure went up to 1.01e-8 - ![[Pasted image 20230710194529.png]] ### [[2023-07-06]] 12:49 PM #### Vacuum levels Sys Vac: 3.64e-06 torr Gun Vac: 1.22e-07 torr #### IGP voltage -0.353 V on gun IGP -0.977 V on second IGP ### [[2023-07-05]] 1:37 PM IGPs on, MVs opened and then closed after passing 10e-7 vacuum (~45 sec) ### [[2023-07-03]] Pumpdown curve over the weekend: ![[Pasted image 20230703123357.png]] Cleaned fibers off of the door o ring #### RGA Spectra Range: 4 ![[ScreenImg-7.jpg]] Range: 5 ![[ScreenImg-9.jpg]] Range 3: ![[ScreenImg-10.jpg]] ##### After opening manual valves Looks pretty much identical Range: 4 ![[ScreenImg-11.jpg]] ### [[2023-06-30]] Start of bakeout log: 6:49PM 2023-06-30 #### Resistances IGP upper: 324.11 Ohms IGP lower: 355.4 Ohms Column heater: 361.47 Ohms Heater band 1: 0.8262 kOhms Heater band 2: 0.8229 kOhms Heater band 3: 0.8355 kOhms #### Current Initial: 1 A After plugging heaters in: 4 A Pressure: 1.52e-4 torr ### [[2023-06-29]] - Whiteboard at start of day - ![[Pasted image 20230629143737.png|sm]] - ### [[2023-05-29]] - Previously recieved new bellows for expanded evacuation line modification - Plasma cleaned the bellows for 23 hours - Aqueous cleaned all other parts for the modification - Plasma cleaning the gun with expanded bellows - Attached plasma cleaner to gun, set to T-Pump pressure - Plasma ignited, but pressure seemily dropped to quikly and plasma went out - Set setpont to 150mt - Plasma ignited, pressure varying between 7x-2 torr and 3x-1 torr - Reverse power goes up to ~2w when pressure increases, and down to ~.5w when pressure is at the low end of the range ### [[2023-05-09]] - Turned on system. - Vented, then connected gun to system vac on the way back down - Software was not reading system vacuum, restarted Zeiss EM server and system vacuum now displaying - Vented, then enabled plasma - Plasma started on the way down, running 20W forward, 2W reverse - System vac 4x-3 torr, plasma vacuum varying between .1 torr and 1 torr - ### [[2023-05-08]] - Preparing for plasma cleaning round 2 - Had to put a blank on the chamber VP pump down port - Started up microscope - Pumped down with plasma clean disabled to just start getting a vacuum. - Configuring plasma cleaner: - Idealy we want to run the plasma pressure setpoint at "Turbo", which results in the lowest pressure and best cleaning - Last time we tried this though, the syystem was unable to regulatre the pressure for such a low setpoint. - We found this to be a result of the gun chamber volume being so small, and it being pumped out with such poor conductance through the VP intermediate stage - Hopefully, with the drastically improved conductance we are able to run the plasma cleaner at a lower pressure. - Starting the plasma - Vented microscope for a few seconds - Armed plasma cleaner - Plasma attemped to ignite at 1 torr - 20W forward, 5W reverse and no ignition - Faulted out with "High Pressure Error" - Changed setpoint from T-Pump (lowest pressure possible) to 200 mT - Rearmed plasma, vented for 5 seconds and pumped - Pressure stabiliation started at 1 torr - RF on at .7 torr - Ignited after 10 seconds - Pressure varying from .17 to 1.2 torr - Pressure seems to be stabilzing between .1 and .4 torr - Seems to be running well for now, if we trip on high pressure fault will furthure increase the setpoint. - For refference, I belive we were at either .5 or 1 torr setpoint last time to get it to stop almost immediatly tripping on high pressure - The microscope is reading ~2x-3 torr - 47 minutes in and scope is now reading 1.2x-3 torr - Plasma secsefully ran for 2 hours, systems pressure now 5.12x-5 torr - Venting, removing the extractor mount, swapping the 4 screws around, then reinstalling the extractor mount and closing the column back up - ### [[2023-05-05]] - Replumed gun evacuation mainfold to not run thorough the VP intermidate column section - Reconfigured to have the plasma cleaner on the IGP port - This lets us also plasma clean the gun flange - ### [[2023-03-10]] - Reassembled lower gun section for cleaning - Made conflat seal with 10 lbf of torque - Armed plasma cleaner - Manually opened column valves - Evacuated - Plasma came on around 5e-1 torr ### [[2023-03-09]] - Aqueous ultrasonic cleaning of column parts ### [[2023-03-06]] > Goal: Be confident that the system is going to pump down when needed. - Assembled cable for relay box - Assembled main power cable with L630P plug - Connected main power and turned instrument on - Turned on PC and opened SmartSEM software - Currently no communication with stage - [ ] todo: Bios error: CMOS voltage low - Installed STEM detector mount in order to seal off chamber - Closed manual gun/IGP isolation valves Making sure we can safely pump down only the chamber and the system won't try to pump the gun: - Unplugged ion pump power supplies - Unplugged pneumatics to gun isolation valve - Turn on relay box - Vac board: code `D032` - Manually reset vac board - System vent, then Evac from vac board - "Switch Active" light came on relay box - Pump control turned on - Manually turned on scroll pump: ![[Pasted image 20230306153248.png]] - Turbo started spinning up - Logged in to SmartSEM Administrator - Unable to vent from software - gives "Stage not initialized - unable to lower Z height" error - Found flow meter cable unplugged from when we fixed a leak earlier - Restarted PC and stage was able to initialize - X axis didn't finish initializing - it just keeps driving the motor all the way to one side - CCD stage camera works - The vent line has a push-to-connect fitting with shutoff - without anything connected to it right now, we have to push in the fitting to manually vent it - Opened the chamber and manually triggered the limit switch ![[Pasted image 20230306162732.png|lg]] - Stage operation now normal in x and y - System Vacuum value appears to be reading correctly now - [x] todo: reconfigure scroll pump enable so that it turns on with scope power and you don't have to press the button - Clicking 3 times on the pressure value allows you to change units - set it to Torr - Ultimate pressure reached in chamber: 4.32e-05 Torr